Geiger Muller Counter Source Ra-226 Substrate Holder inside Coating Chamber The Flow Chart of the Measurement Procedure The Measurement of Coating Thickness by Alpha Thickness Gauging Two Types of Alpha Radioactive Source; a Americium-241 and The Image of

x LIST OF FIGURE

2.1 Types of Ionizing Radiation

13 2.2 Weld X-Ray 19

2.3 Using Radiation to Control Paper Thickness

20

2.7 Geiger Muller Tube Cross Section Depicting the Progression of the Geiger

Discharge 31

2.8 Two Commercial Hand Held Portable Gas-Filled Detectors.

33

3.1 The Flow Chart of the PSMI

36 3.2 The Flow Chart of the PSMII 37

3.3 Vacuum PVD System

44

3.4 Base Plate

45

3.5 The Counter Tube Holder, Source Holder and Plate Holder

45

3.6 The Thick Lead Plate

45

3.7 Counter Tube

– Type B 46

3.8 Geiger Muller Counter

– Phywe 46

3.9 Source Ra-226

46 3.10 PVD Unbalanced Magnetron Sputtering System VACTEC Korea Model VTC PVD 1000 47

3.11 Substrate Holder inside Coating Chamber

47 3.12 Tungsten Carbide Cutting Tool insert commercially made by Sumitomo 48

3.13 The Flow Chart of the Measurement Procedure

51

4.1 The Measurement of Coating Thickness by Alpha Thickness Gauging

54 Method

4.2 Two Types of Alpha Radioactive Source; a Americium-241 and

54 b Radium-238

4.3 The Image of Cutting Tool Coating Thickness Measure by Scanning

57 Electron Microscope SEM xi 4.4 Graph of Backscattering Rate Counts60s vs. Coating Thickness μm 60 for Coating Thickness Measurement by Using Radium-238 4.5 Graph of Backscattering Rate Counts60s vs. Coating Thickness μm 62 for Coating Thickness Measurement Using Americium-241

4.6 The Trend Equation for Measurement Using Radium-238

64

4.7 The Trend Equation for Measurement Using Americium-241

66

4.8 Sample of Cutting Tool

69

4.9 The Image of Cutting Tool Coating Thickness; a Coating Thickness is 70

Uniform and b Coating Thickness is Non-Uniform

4.10 Position of the Double-Sided Tape and Samples of Cutting Tool on the 71

Plate Holder xii LIST OF ABBREVIATIONS HSS - High Speed Steel CVD - Chemical Vapor Deposition PVD - Physical Vapor Deposition ANSI - American National Standard Institute NDT - Non-Destructive Test Ra-238 - Radium-238 Am-241 - Americium-241 Pu-239 - Plutonium-239 Co-60 - Cobalt-60 UV - Ultra Violet TiAIN - Titanium-Aluminum-Nitride WC - Tungsten Carbide SEM - Scanning Electron Microscope 1 CHAPTER 1 INTRODUCTION

1.1 Background of the Project