iv
TABLE OF
CONTENTS PAGE
DECLARATION APPROVAL
DEDICATION ABSTRACT
i
ABSTRAK ii
ACKNOWLEDGEMENT iii
TABLE OF CONTENTS iv
LIST OF TABLES vii
LIST OF FIGURES ix
LIST OF APPENDICES xiii
LIST OF ABBREVIATIONS xiv
LIST OF PUBLICATION xvii
CHAPTER 1. INTRODUCTION
1
1.1 Background of study
1
1.2 Introduction
1 1.3
Problem Statement 8
1.4 Research Goals and Objectives
9 1.5
Scope of the Research 9
1.6 Organization of Thesis
10
2. LITERATURE REVIEW 11
2.1 Introduction
Introduction 11
2.2 PVD DC Arc system technology
PVD DC Arc system technology 12
2.3 Physical Vapor Deposition PVD Processes
Physical Vapor Deposition PVD Processes 15
2.4 Vacuum Deposition Vacuum Evaporation 17
2.5 Arc Vapor Deposition System
Arc Vapor Deposition System 20
2.6 Ion Plating
Ion Plating 20
2.6.1 PVD Process Considerations 21
2.6.2 Deposition of Al, Ti N coatings 22
2.6.3 Different Processes of PVD Deposition 23
2.7 Parameters for deposition of coating
24 2.7.1
Effect of cathode composition on PVD deposition Effect of cathode composition on PVD deposition
25 2.7.2
Effect of gas pressure PVD deposition Effect of gas pressure PVD deposition
26 2.7.3
Effect of substrate bias on PVDdeposition Effect of substrate bias on PVDdeposition
30 2.7.4
Phase relationship and crystal structure of Al, Ti N Phase relationship and crystal structure of Al, Ti N
31 2.7.5
Effect of interlayerintermediate layer on coating adhesion Effect of interlayerintermediate layer on coating adhesion
32 2.7.6
Roughness of coated surface Roughness of coated surface
33 2.7.7
Hardness of Al, Ti N layer coating Hardness of Al, Ti N layer coating
34
2.7.8 Arc vaporization 35
2.7.9 Crystal structure
36 2.7.10
Adhesion Properties analysis 38
2.7.11 Tribological coatings
39 2.7.12 Friction and wear
40
v 2.8
wear 41
2.8.1 Wear mechanisms 42
2.9 Summary
45
3. RESEARCH METHODOLOGY 47
3.1 Introduction
47 3.2
Development experimental coating plan 49
3.2.1 Deposition Process 50
3.2.2 Loading sample in chamber 51
3.2.3 Pumping and Heating of coating chamber 52
3.2.4 Substrate Ion Cleaning 53
3.2.5 Ti buffer layer deposition 53
3.2.6 AlTiN coating deposition 54
3.2.7 Dry Cooling 55
3.3 Pretreatment of substrate
56 3.4 Coating Characterization Methods
58 3.4.1 Micro hardness
59 3.4.2 Adhesion
59 3.4.3 Friction and wear analyses
61 3.4.4 Determination of surface roughness
62 3.4.5 Phase analysis X-ray diffraction technique
63 3.4.6 Materials Characterization using SEM
65 3.4.7 Fracture CNC EDM Wire Cut initiation sample
66 3.4.8
Determination of surface roughness by atomic force microscopy imaging
67 3.5
Determination of cutting Performance by turning test 68
4. RESULT AND DISCUSSION 72
