Josh IDF Berlin 0403

90 nm and Beyond:
Moore's Law and More
Josh Walden
Fab24 Plant Manager
Technology and Manufacturing Group

Copyright © 2002 Intel Corporation.

1

Agenda
y Process Technology Evolution
y 90 nm Logic Process
y 90 nm Communication Process
y R & D Beyond 90 nm

Intel, Itanium, Xeon, Pentium and NetBurst are trademarks or registered trademarks of Intel Corporation or its
subsidiaries in the United States or other countries.

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A New Process Every 2 Years
Process Name P856

P858

Px60

P1262

P1264

P1266

1st Production

1997

1999

2001

2003

2005

2007

Lithography

0.25µm 0.18µm 0.13µm 90nm

65nm

45nm

Gate Length

0.20µm 0.13µm