halogen bulb halogen bulb

I-27

D: Twin fiber optics illumination C: LED ring illumination

B: Ring fiber optics illumination A: Vertical surface illumination Halogen

PCB IC package Garnet Black resin molded parts HDD suspension PCB Electric parts Flexible PCB PCB IC circuit PCB HDD suspension Twin fiber-optics illuminator Ring fiber-optics illuminator SPECIFICATIONS Order No. 176-366A PPLICABLE¬MICROSCOPES -¬MODELS ,ENGTH¬OF¬lBER¬CABLE 40 x 1000mm ,IGHT¬SOURCE ALOGEN¬BULB¬6¬7

517181: halogen bulb

IMENSIONS¬7¬X¬¬X¬ ,IGHT¬UNIT¬¬X¬¬X¬¬ 235 x 76 x 120mm LED Ring Illuminator LED Ring Light for FS Objectives SPECIFICATIONS Order No. 176-367-2A PPLICABLE¬MICROSCOPES -¬MODELS¬WITH¬8888¬ objective ,IGHT¬SOURCE 7HITE¬, ,ENGTH¬OF¬,¬CABLE 59 1500mm SPECIFICATIONS Order No. Please contact us PPLICABLE¬MICROSCOPES -¬MODELS¬WITH¬888¬ objective ,IGHT¬SOURCE Supplied from microscope surface illumination SPECIFICATIONS Order No. 176-343A PPLICABLE¬MICROSCOPES -¬- 5¬MODELS ,ENGTH¬OF¬lBER¬CABLE 28 700mm ,IGHT¬SOURCE ALOGEN¬BULB¬6¬7

517181: halogen bulb

IMENSIONS¬7¬X¬¬X¬ ,IGHT¬UNIT¬¬X¬¬X¬ 235 x 76 x 120mm US-1001 I-28 SERIES 264 — 2-D Data Processing Unit Technical Data Resolution: 0.0001mm Program functions: Part program creation, execution, editing -Ì̈ÈVÊ«ÀœViÃȘ}\Ê Õ“LiÀʜvÊ`Ì]ʓ݈“Õ“ÊۏÕi]Ê minimum value, mean value, standard deviation, range, histogram Element memory: Maximum of 1000 elements Element recall: Point, line, circle, distance, ellipse, rectangular hole, slotted hole, intersection and intersecting angle Element key-in: Point, line, circle Display system: Monographic LCD 320 x 240 dots, with back light Measurement result wiʜÕÌ«ÕÌ\ÊÊ ,-‡ÓÎÓ ÊœÕÌ«ÕÌÊ­ -6ÊvœÀ“Ì]Ê18‡ 10F format Display language: JapaneseEnglishGermanFrench ItalianSpanishPortuguese Data input: ,-‡ÓÎÓ ]Ê8É9ɇ݈ÃÊÈ}˜]ʜœÌÃ܈ÌV… Data output: RS-232C, Printer, Floppy disk drive unit Power supply 100V AC to 240V AC Mass 2.2kg stand-mount type 2.1kg arm-mount type QM-Data 200 Stand-mount type UÊÀ«…ˆVÊ`ˆÃ«Þ Measurement information and data are visualized on the back-lit LCD display with graphical interfaces. The geometric feature that you selected is displayed with the probing navigator. The measurements map and blink indication show you the probing points and sequences. Simply probe points and click by following the blink indicator the measurement can be easily completed even a beginner. This improves operation accuracy and reduces errors and time. UʘÌՈ̈ÛiÊ«˜iÊ`iÈ}˜ The QM-Data200 employs the Geometry Keys” to accelerate the measurement process. The probing routine of standard geometric features and combinations are designed with Geometry Keys on the front panel. Click of a key that you need and capture features you can complete the measurement quickly and accurately. This improves operator productivity, reduce errors and save operation time and cost. The QM-Data200 is a geometric readouts analysis unit for optical instruments like a profile projectors. This features powerful 2-D coordinate measurement capabilities with unmatched simple key operation. The QM-Data200 improves operator productivity, minimizes errors and save a total measurement time and production cost. FEATURES UÊ6ÀˆœÕÃÊ}À«…ˆVÊ`ˆÃ«ÞÃʜ˜Ê̅iʏÀ}iÊ Ê screen for easy measurement operations. Uʘi‡ŽiÞʜ«iÀ̈œ˜ÊvœÀÊVœ“Lˆ˜i`Ê measurements that are often used circle- circle distance, etc. UʅiÊʓiÃÕÀi“i˜ÌÊv՘V̈œ˜Ê­Õ̜“̈VÊ identification of measuring item eliminates switching between the measurement command keys. UÊ µÕˆ««i`Ê܈̅Ê̅iʓiÃÕÀi“i˜ÌÊ«ÀœVi`ÕÀiÊ teaching function and the measuring position navigation in Repeat mode. UʅiÊÕÃiÀʓi˜ÕÊv՘V̈œ˜ÊœÜÃÊÕÃiÀÊÌœÊ register measurement commands or part programs to create hisher own menu. UʜiÀ˜ViÊ✘iʓiÃÕÀi“i˜ÌʜvÊ`ÌÊ processing result and various statistical processing for each item are available. UÊ iÃÕÀi“i˜ÌÊÀiÃՏÌʜÕÌ«ÕÌÊ̜ʔMS- Excel” in spreadsheet CSV format. UʅiʓiÃÕÀi“i˜ÌÊ«ÀœVi`ÕÀiʘ`Ê measurement result can be saved, using the optional floppy disk drive unit. UÊܜʓœ`iÃÊÀiÊۈLi\ÊÊÃ̘`‡œ˜iÊ type with tilt system and a flexible arm type that can be mounted on a Profile Projector. QM-Data200 Order No.: 264-145A stand-mount type Order No.: 264-146A arm-mount type Order No.: 264-149A for Hyper MFMF-U US-1001 I-29 ™£°x £™xä {{°x ™{ For FDD unit connection USB Power switch For footswitch input For printer connection For RS-232C output Connected to PC SPC cable 936937 1m x2pcs. Connecting cable D 12AAD195 Connecting cable B 12AAD193 Connecting cable C 12AAD194 MUX-10F 264-002A DMX-2 12AAD538 RS-232C cable 2m 12AAA807 Main unit with SPC output Main unit with RS-2322C output KC Counter PJ-A3000DF, PJ-H30, MFMF-U PJ-A3000, PH-3515F 172-847, PJ-500 Main unit without counter All profile projectors with the linear scale XY stage can be connected directly. For stick memory connection USB QM-Data200: Rear panel Optional Accessories 12AAH035: Floppy disk drive unit USB type 12AAD034: Receipt printer for 120V 908353: Printer paper for receipt printer 12AAA804: Printer cable 2m 937179T: Foot switch 12AAD193: Connection cable B 12AAD194: Connection cable C 12AAD195: Connection cable D 12AAA807: RS-232C cable 2m 12AAA920: RS-232C cable 3m DIMENSIONS Optional Accessories 12AAE671: Detector attachment A PJ-A3000, PJ-H30, PH-3515, PH-A14 series Adaptation diameter of a screen: 10” ø250 to 14” ø350mm 12AAE672: Detector attachment B PJ-500, PV-5110, PV-600A series Adaptation diameter of a screen: 20” ø500 to 24” ø600mm Detector attachment optional OPTOEYE-200 …iÊ 9 ‡Óääʓ}iÊ `}iÊ-i˜ÃœÀÊ eliminates human errors which may be involved in visual alignment, ensuring speedy, accurate, and consistent “iÃÕÀi“i˜ÌÃ]ÊÀi}À`iÃÃʜvʜ«iÀ̜À¿ÃÊΈ° FEATURES UÊ 9 ‡ÓääÊ`œ«ÌÃÊÊ̅ˆ˜ÊwLiÀ‡œ«ÌˆVÊ cable for detector connection to offer easy set-up and smart operation without obstructing your view. UÊ Àˆ}…Ìʘ`Ê`ÀŽÊLÕÌ̜˜ÃʏœÜÊiÃÞÊ calibration. UÊ 9 ÊV˜ÊLiÊ«œÜiÀi`ÊLÞÊ+‡ÌÓääÊ via the connecting cable. It means that no AC adapter is required. UÊThe brightness of the chart can be adjusted. Technical Data Image detection UʈÀiV̈ۈÌÞ\Ê œ˜‡`ˆÀiV̈œ˜ UÊMin. diameter: ø2mm on the screen UÊMin. width: 1mm on the screen UÊMax. moving speed: 1000mms Applicable illumination UÊÞ«i\Ê Surface Contour illumination UÊRange: 30Lx to 1500Lx on the screen Bright-Dark field difference: 20Lx Repeatability: 1μm in contour illumination Function: Error in detection of illumination change Supporting a contour illumination brightness selector switch of projector OPTOEYE-200 Order No.: 332-151 unit: mm US-1001 I-30 FEATURES UʅiÊÕ̜“̈VÊi`}i‡`iÌiV̈œ˜Ê̜œÃʘ`Ê various macro icons allow measurement in one easy step. UʅiÊ}À«…ˆVÃʘ`ʓiÃÕÀi“i˜Ìʘۈ}̈œ˜Ê functions facilitate operation. Uʓ}iÊ`Ìʈ˜«ÕÌÉÃ̜À}iÊv՘V̈œ˜° UÊiÃÕÀi“i˜ÌÊÀiÃՏÌÃÊÀiʜÕÌ«ÕÌÊ̜Ê-‡ Excel ® . This lets the user generate an inspection table on the same computer. UʏœÜÃÊ̅iÊ̜iÀ˜ViÊ✘iʓiÃÕÀi“i˜ÌʜvÊ measurement results and various types of statistical processing for each item. UÊ œ“Lˆ˜i`ÊÕÃiÊ܈̅Ê̅iÊvœVÕÃÊ«ˆœÌÊ«ÀœÛˆ`iÃÊ high-accuracy in height measurements. Patent pending SERIES 359 — Vision System Retrofi t for Microscopes The PC system, QSPAK software and microscope are optional. QSPAK Measurement Window QSPAK, optional software For observationcomparison of form s¬4EMPLATE¬MATCHING¬FUNCTION s¬-ANUAL¬PATTERN¬MATCHING¬FUNCTION For simple measurement s¬NE CLICK¬EDGE¬DETECTION¬TOOL¬FUNCTION s¬3MART¬TOOL¬FUNCTION s¬5SER¬MACRO¬FUNCTION For repeated measurementauto- measurement s¬1UICK¬NAVIGATION¬FUNCTION s¬0LAYBACK¬FUNCTION s¬RAPHIC¬FUNCTION s¬XTERNAL¬DATA¬OUTPUT¬FUNCTION s¬3TATISTICAL¬CALCULATION¬FUNCTION Technical Data Projected image: Inverted image Camera unit Ê Uʓ}iÊÃi˜ÃœÀ\Ê œœÀÊ -ÊV“iÀ Ê UÊ,i܏Ṏœ˜\Ê ä°ää䣓“ Ê Uʈ“i˜Ãˆœ˜Ã\Ê {ÝÓ°ÎÝΰx»ÊÉÊ£ääÝxnÝn™““Ê­7ÝÝÊ® Ê UÊÃÃ\Ê £LÃÊÉÊä°{Ž} Adapter unit Ê UÊ«iÀ̈˜}ÊÜvÌÜÀi\Ê+-Ê61 Ê­œ«Ìˆœ˜® Ê Uʈ“i˜Ãˆœ˜Ã\Ê £°nÊÝÊx»ÊÉÊ{xÊÝÊ£ÓΓ“ Ê UÊ}˜ˆwÊV̈œ˜\Ê ä°x8 Ê UÊÃÃ\Ê ä°nLÃÊÉÊä°ÎŽ} }˜ˆwÊV̈œ˜Ã\Ê Ó£8ʇÊÓ£ä8ʜ˜Ê£™¸Ê“œ˜ˆÌœÀ Standard accessory: Foot switch 12AAJ088 Vision Unit No.: 359-737 for MF C No.: 359-739 for MF-UC No.: 359-791 for Hyper MF MFU UÊÊÃiÀˆiÃʜvʓiÃÕÀˆ˜}ʜ«iÀ̈œ˜ÃÊV˜ÊLiÊ performed using just one screen display. UʅiÊÕ̜‡LÀˆ}…̘iÃÃÊVœ˜ÌÀœÊv՘V̈œ˜Ê faithfully reproduces the type and degree of illumination used. This function is limited to the MFMF-U series. One-click Edge Detection Just by clicking the mouse near the edge of a workpiece, QSPAK automatically scans the edge and detects it, showing its coordinates. This function also works with the point tool, box tool, circle tool and auto-focus tool. Graphic Window The measurement results and measured elements are plotted in the graphic window in real-time. By using this function the user can check the current measuring position at a glance. The graphic window can be used for geometrical calculation. Fiber-optic ring illuminator CMOS camera unit QSPAK Vision Unit 10X objective 5X objective 3X objective 1X objective Measuring microscope w XY or XYZ counter Calibration glass chart No. 958448 Laser printer Foot switch No. 12AAJ088 Adapter unit : Optional accessory PC 19 color display Connecting cable Multi IO card Focus Pilot No. 375-057A: for MF models No. 375-067A: for MF-U models A for ULCSA, D for CEE, E for BS, DC for China, K for EK, C for Taiwan, No suffix is required for JIS100V US-1001 I-31 SERIES 378 — High Power Inspection Microscope FEATURES UʅiÊVœ“«iÌiÊÃÞÃÌi“ÊœvÊ-‡ÎääÊV˜ÊLiÊ composed of a variety of parts for meeting diverse applications. UÊۈLiÊ܈̅ʜÀÊ܈̅œÕÌÊÊÌÀ˜Ã“ˆÌÌi`Ê illuminator. UÊ1ÌÀ‡œ˜}ÊܜÀŽˆ˜}Ê`ˆÃ̘ViʜLiV̈ÛiÃÊ provide easy manipulation of workpieces. UÊ ÃÞÊÃ܈ÌV…ˆ˜}ÊLiÌÜii˜Ê̅iÊLÀˆ}…̇wi`Ê illumination and the dark-field illumination. Uʫ̈œ˜ÊVViÃÜÀˆiÃÊ܈`i˜Ê̅iÊÀ˜}iʜvÊ applications. FS-300 with optional accessories The FS-300 is designed for inspecting micro- components such as IC chips and video head parts. The optical system features ultra-long working distance objectives, wide view field eyepieces, and independent correction for lateral chromatic aberration. SPECIFICATIONS Main unit Observation system Bright field BF: 378-320, 378-322, 378-324, 378-326 Brightdark field BFDF: 378-321, 378-323, 378-325, 378-327 Reflected illumination Koehler illumination With aperture diaphragm centering mechanism and field stop 12V100W halogen lamp non-stepped brightness adjustment With filter mounting slot 2-slot With BFDF switching slide 378-321, 378-323, 378-325, 378-327 only Transmitted illumination 12V100W fiber illumination non-stepped brightness adjustment With aperture diaphragm 378-322, 378-323, 378-326, 378-327 only Focus adjustment With concentric coarse and fine focusing wheels right and left Fine adjustment: 0.1mmrev. for 32mm travel range Coarse adjustment: 3.8mmrev. for 32mm travel range Power revolver Inward type with 4 lens mounts Workstage ÀÛiÊÃÌÀœŽi\Ê£{ÊÝÊ£Ó¸ÊÉÊÎxÈÊÝÊÎäȓ“Ê܈̅Ê8‡É9‡ÝˆÃÊw˜iÊvii`ʎ˜œLÃÊ and coarse travel handle Optical tube Type Trinocular tube erect image Field number 24 Depression angle ˆÝi`ÊÓä¨\Ê378-320, 378-321, 378-322, 378-323 `ÕÃÌLiÊä¨Ê̜ÊÓä¨\Ê378-324, 378-325, 378-326, 378-327 Intermediate image mag. £8 Optical pass ratio eye piece TV: 1000 or 0100 Pupil distance Siedentopf type, adjustment range: 2 - 3 51 - 76mm Eyepiece Field of view £ä8É©Îä\Ê378-320, 378-321, 378-322, 378-323 £ä8É©Ó{\Ê378-324, 378-325, 378-326, 378-327 Applicable objective optional M Plan Apo, M Plan Apo SL, G Plan Apo: 378-320, 378-322, 378-324, 378-326 BD Plan Apo, BD Plan Apo SL: 378-321, 378-323, 378-325, 378-327 Dimensions Main unit 14.2 x 32 x 27.2 360 x 803 x 568.5mm Workstage 28 x 16 700 x 400mm Power supply 100 to 240VAC, 5060Hz Power consumption Approx. 150W: 378-320, 378-321, 378-324, 378-325 Approx. 300W: 378-322, 378-323, 378-326, 378-327 Mass Approx. 110lbs 50kg including workstage Polarized light observation: Observing only the filtered light that vibrates in one direction. Used for observing materials with special optical characteristics, such as mineral and liquid crystal. Differential interference observation: Effective in detecting fine scratches and steps on the surface of metal, liquid crystal, and semiconductors. Dark field observation: Observing only the scattered light by shutting down the direct light to the objectives. The scratches and dust that cannot be viewed in the bright view field can be observed by a high-contrast. Bright field observation: Most common method of observation. Observing directly the light reflected on the surface of workpiece. US-1001 I-32 SERIES 378 — Microscope Unit for Semiconductor Inspection -…œÀÌÊLÃiʓœ`iÊ œ° Order No. FS70-S 378-184-2 FS70-THS 378-184-4 FS70Z-S 378-185-2 FS70Z-THS 378-185-4 FS70L-S 378-186-2 FS70L-THS 378-186-4 FS70L4-S 378-187-2 FS70L4-THS 378-187-4 Focus adjustment 50mm travel range with concentric coarse 3.8mmrev and fine 0.1mmrev focusing wheels right left Image Erect image Pupil distance Siedentopf type, adjustment range: 2 - 3” 51 - 76mm Field number 24 Tilt angle — 0° - 20° — 0° - 20° — 0° - 20° — 0° - 20° Optical pass ratio 5050 1000 or 0100 5050 1000 or 0100 1000 or 0100 1000 or 0100 Protective filter — — Built-in laser beam filter Built-in laser beam filter Tube lens £8 £8ʇÊÓ8Ê✜“ £8 £8 Applicable laser — — 1064532355nm 532266nm Camera mount C-mount using optional adapter B Use a laser with TV port. C-mount receptacle with green filter switch Illumination system, optional Reflective illumination for bright field Koehler illumination, with aperture diaphragm 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W Objective, optional for observation M Plan Apo, M Plan Apo SL, G Plan Apo Objective, optional for laser-cutting — É Ê˜Ê ,] É Ê˜Ê 16 M Plan UV Loading weight 32lbs14.5kg 30lbs13.6kg 31lbs14.1kg 29lbs13.2kg 31lbs14.2kg 30lbs13.5kg 31lbs13.9kg 29lbs13.1kg Mass main unit 13lbs6.1kg 15.5lbs7.1kg 14.5lbs6.6kg 16.5lbs7.5kg 14lbs6.4kg 15.5lbs7.2kg 14.5lbs6.7kg 16.5lbs7.5kg Loading weight on optical tube excluding weight of objective lenses and eyepieces SPECIFICATIONS œ`iÊ œ° Order No. FS70 378-184-1 FS70-TH 378-184-3 FS70Z 378-185-1 FS70Z-TH 378-185-3 FS70L 378-186-1 FS70L-TH 378-186-3 FS70L4 378-187-1 FS70L4-TH 378-187-3 FEATURES Uʅiʜ«ÌˆVÊÃÞÃÌi“Ê̅ÌʅÃʜÀˆ}ˆ˜ÞÊ developed for the best seller FS 60 models was further enhanced for the FS70 models. It is ideal as a microscope unit of a prober station for semiconductors. All models CE marked. UʅiÊ-ÇäÊÃÕ««œÀÌÃÊ̅ÀiiÊÌÞ«iÃʜvÊ9Ê laser wavelength ranges 1064nm, 532nm and 355nm, while the FS70L4 supports two types of wavelength ranges 532nm and 266nm, thus expanding a scope of laser applications, allowing laser-cutting of thin-films used in semiconductors and liquid crystal substrates. However, Mitutoyo assumes no responsibility whatsoever for the performance andor safety of the laser system used with Mitutoyo microscopes. a careful examination is recommended in selecting a laser-emission unit. UÊ Àˆ}…ÌÊwi`]ʈvviÀi˜ÌˆÊ˜ÌiÀviÀi˜ViÊ Contrast DIC and polarized observations are standard with the FS70Z. The FS70L and FS70L4 do not support the DIC method. UÊ ÞÊi“«œÞˆ˜}ʘʈ˜ÜÀ`ÊÀiۜÛiÀ]Ê̅iÊ long working distance objectives provide excellent operability. UʘÊiÀ}œ˜œ“ˆVÊ`iÈ}˜Ê܈̅ÊÃÕ«iÀLÊ operatability: the FS70 employs the erect- image optical system the image in the field of view has the same orientation as the specimen and enlarged fine focus adjustment wheel with rubber grip coarse adjustment knob. Technical Data Focus adjustment Ê UÊi̅œ`\ With concentric coarse and fine focusing wheels right and left Ê UÊ,˜}i\Ê 50mm travel range 0.1mmrev. for fine adjustment, 3.8mmrev. for coarse adjustment Trinocular tube Image: Erect image Pupil distance: Siedentopf type, adjustment range: 2-3 51-76mm Field number: 24 ˆÌʘ}i\Ê ä¨Ê‡ÊÓä¨Ê­œ˜Þʇ]ʇ-ʓœ`iÃ® Illumination system: Reflective illumination for bright field Koehler illumination, with aperture diaphragm Light source: 12V100W fiber optics, non-stepped adjustment, light guide length 1.5m, power consumption 150W Objectives optional: M Plan Apo-4, M Plan Apo SL, G Plan Apo FS70Z FS70L FS70L4 US-1001 I-33 SERIES 378 — Assembly Type Microscope Unit FEATURES Uʈ}…‡À̈œÊ{ä8Ê✜“Ê܈̅ÊiÝVii˜ÌÊ operability. Uʈ}…‡Ài܏Ṏœ˜ÊœLiV̈ÛiÊ­£ä8®ÊÃÕ««ˆi`ÊÃÊ standard. UÊ6ÀˆœÕÃʜ«Ìˆœ˜ÊLÀˆ}…̇wi`ʜLiV̈ÛiÃÊ attachable. UʅiÊψ`iÊÌÞ«iʏi˜ÃʓœÕ˜ÌʏœÜÃʵՈVŽÊ change between the monitoring and laser beam cutting objectives. UʅÀiiÊÜÛii˜}̅ʭ˜iÀʈ˜vÀÀi`]ÊۈÈLi]Ê near ultraviolet, ultraviolet lasers supported. UÊ ‡“œÕ˜ÌÊÌÌV…i`ÊÃÊÃ̘`À`° Uʅiʓ˜ÕÊœÀÊ«œÜiÀÊÌÞ«iÊÃÞÃÌi“Ê selectable according to the purpose. The VM-ZOOM40 is an assembly type microscope unit that has drastically improved operability and the quality of visual images by combining the main unit, which has a high-magnification zooming system, with a newly developed high-resolution objective, which has a long working distance. If the VM- ZOOM40 is used with an analysis prober and various other laser repair equipment, it will greatly aid in development, manufacturing, and inspection of semiconductors and LCD panels. SPECIFICATIONS Total magnification £ää8ʇÊ{]äää8ʭ܅i˜ÊÕȘ}Ê 12-inch CCD camera and 14-inch monitor Magnification of tube ä°Óx8ʇʣä8Ê Zoom ratio 1:40 Objective ʏ˜Ê«œÊ,Ê£ä8 Field of view UÊ£ÉӇˆ˜V…Ê ÊV“iÀÊ­œ«Ìˆœ˜®\Ê 2.56x1.92mm - 0.064x0.048mm UÊ ˆ˜œVՏÀ\ʩΰӓ“ʇʩä°än““Ê Reflected illumination Uʜi…iÀÊÃÞÃÌi“ʭ܈̅ʫiÀÌÕÀiÊ stop Power zoom type. Uʫ̈œ˜ÊˆÕ“ˆ˜Ìˆœ˜ÊˆÃÊÀiµÕˆÀi`Ê for the manual zoom type. Light source Halogen bulb 21V, 150W Focusing unit Concentric coarse and fine wheels Power supply 20Lx min. on the screen Mass Main unit: Approx. 7kg Binocular unit: 1kg Remote controller unit: Approx. 7kg Selection Guide of System Configuration Order No. Depends on each system configuration 378-171A 378-172A 378-173A 378-174A 378-175A 378-176A 378-177A 378-178A 378-181A 378-182A Remarks Manual zoom function ● ● ● ● Power zoom function ● ● ● ● ● ● Fiber-optic illumination controller is also provided. Single-objective mount ● ● Double-objective mount ● ● ● ● ● ● ● ● The objective can be switched due to the sliding mechanism. Binocular unit ● ● ● ● ● £ä8ÊiÞi«ˆiViÃÊ­ÎÇn‡nxÈ®ÊÀiÊ«ÀœÛˆ`i`° 9ʏÃiÀÊ­£äÈ{ÉxÎÓÉÎxx˜“®Ê“œÕ˜Ì ● ● ● ● 9ʏÃiÀÊ­xÎÓÉÓÈȘ“®Ê“œÕ˜Ì ● ● Focusing unit ● ● ● ● ● ● ● ● ● ● CCD camera mount ● ● ● ● ● ● ● ● ● ● ʏ˜Ê«œÊ,Ê£ä8ÊLiV̈Ûi ● ● ● ● ● ● ● ● ● ● ●: Included in the set. US-1001 I-34 VMU-V SERIES 378 — Video Microscope Unit Selection Guide of System Configuration Order No. Depends on each system configuration 378-505 378-506 378-507 378-508 378-513 378-514 Vertical CCD camera mount ● ● ● ● ● Horizontal CCD camera mount ● 9ʏÃiÀʓœÕ˜Ì ● ● ● ● Fiber-optic illumination unit ● ● ● ● M Plan Apo, M Plan Apo SL, G Plan Apo objectives for bright field observation ▲ ▲ ▲ ▲ ▲ ▲ ʏ˜Ê«œÊ ,]Ê Ê˜Ê«œÊ ,]ÊÊ ˜Ê«œÊ 16ʘ`Ê Ê˜Ê«œÊ 16Ê objectives for laser cutting ▲ ▲ ▲ M Plan UV objectives for laser machining ▲ ▲ ●: Provided, ▲: Available as optional accessory The VMU is a compact, light-weight, and easy-to-install microscope unit for CCD camera monitoring in semiconductor fabrications. SPECIFICATIONS Maginification of tube £8 Applicable wavelength 378-505, 378-506 iÀ‡ˆ˜vÀÀi`ʘ`ÊۈÈLiÊÀ`ˆÌˆœ˜ 378-507 378-513 iÀ‡ˆ˜vÀÀi`ÊpۈÈLipʘiÀ‡Õ‡ traviolet radiation 378-508 Visible and ultraviolet radiation 378-514 iÀ‡ˆ˜vÀÀi`Ê̜ÊՏÌÀۈœiÌ Objective Optional Reflected illumination UÊiiVi˜ÌÀˆVÊÃÞÃÌi“Ê܈̅ʫiÀÌÕÀiÊ stop system UʈLiÀ‡œ«ÌˆVʈÕ“ˆ˜ÌœÀÊ­œ«Ìˆœ˜®Ê is required. Light source Halogen bulb 21V, 150W optional Mass 378-505: 570g 378-506: 590g 378-507: 980g 378-508: 1010g 378-513: 1300g 378-514: 1300g FEATURES Uʅiʜ«ÌˆVÊÃÞÃÌi“ÊviÌÕÀiÃÊՏÌÀ‡œ˜}Ê working distance objectives and correction for the wide range of radiation. UʅiÊwLiÀ‡œ«ÌˆVÊÀiyiVÌi`ʈÕ“ˆ˜Ìˆœ˜ÊŽii«ÃÊ the workpiece free from thermal expansion caused by heat. The fiber-optic illuminator is required for the light source. UʏÜÊۈLiÊ܈̅ÊʏÃiÀʓœÕ˜ÌʜÀÊ revolving nosepiece objective mount. VMU-H VMU-L VMU-L4 US-1001 I-35 SERIES 378 FEATURES UʅiÊwÊi`ʜvÊۈiÜʈÃÊiÝÌÀÊ܈`i° Uʫ̈œ˜ÊÀïViÃÊÀiÊۈLi° Objectives SERIES 378 The Mitutoyo 378 Series objectives have the ܜÀ`¿Ãʏœ˜}iÃÌÊܜÀŽˆ˜}Ê`ˆÃ̘Viʘ`Ê˜Ê infi nity correction optical system. These ob- jectives provide fl exible observation at high magnifi cations and independent correction of chromatic aberration. FEATURES Uʅiʏœ˜}ÊܜÀŽˆ˜}Ê`ˆÃ̘ViÊÌÞ«iʜLiV̈ÛiÃÊ provide excellent clearance between the lens surface and the workpiece surface in focus, making it possible to observe work- pieces which are usually hard-to-focus because of awkward projections. 378-858 378-857 378-866 M Plan Apo and M Plan Apo SL objectives for bright fi eld observation BD Plan Apo and BD Plan Apo SL objectives for brightdark fi eld observation Near-infrared radiation corrected M Plan Apo NIR objectives Near-ultraviolet radiation corrected M Plan Apo NUV objectives Ultraviolet radiation corrected M Plan UV objectives Reticles optional 516848: Cross-hair

516576: Broken cross hair 90