I-27
D: Twin fiber optics illumination C: LED ring illumination
B: Ring fiber optics illumination A: Vertical surface illumination Halogen
PCB IC package
Garnet Black resin molded parts
HDD suspension PCB
Electric parts Flexible PCB
PCB IC circuit
PCB HDD suspension
Twin fiber-optics illuminator Ring fiber-optics illuminator
SPECIFICATIONS
Order No. 176-366A
PPLICABLE¬MICROSCOPES -¬MODELS
,ENGTH¬OF¬lBER¬CABLE 40 x 1000mm
,IGHT¬SOURCE ALOGEN¬BULB¬6¬7
517181: halogen bulb
IMENSIONS¬7¬X¬¬X¬ ,IGHT¬UNIT¬¬X¬¬X¬¬
235 x 76 x 120mm
LED Ring Illuminator LED Ring Light for FS Objectives
SPECIFICATIONS
Order No. 176-367-2A
PPLICABLE¬MICROSCOPES -¬MODELS¬WITH¬8888¬
objective ,IGHT¬SOURCE
7HITE¬, ,ENGTH¬OF¬,¬CABLE
59 1500mm
SPECIFICATIONS
Order No. Please contact us
PPLICABLE¬MICROSCOPES -¬MODELS¬WITH¬888¬
objective ,IGHT¬SOURCE
Supplied from microscope surface illumination
SPECIFICATIONS
Order No. 176-343A
PPLICABLE¬MICROSCOPES -¬-
5¬MODELS
,ENGTH¬OF¬lBER¬CABLE 28 700mm
,IGHT¬SOURCE ALOGEN¬BULB¬6¬7
517181: halogen bulb
IMENSIONS¬7¬X¬¬X¬ ,IGHT¬UNIT¬¬X¬¬X¬
235 x 76 x 120mm
US-1001
I-28
SERIES 264 — 2-D Data Processing Unit
Technical Data
Resolution: 0.0001mm Program functions:
Part program creation, execution, editing -ÌÌÃVÊ«ÀViÃÃ}\Ê ÕLiÀÊvÊ`Ì]ÊÝÕÊÛÕi]Ê
minimum value, mean value, standard deviation, range, histogram
Element memory: Maximum of 1000 elements
Element recall: Point, line, circle, distance, ellipse,
rectangular hole, slotted hole, intersection and intersecting angle
Element key-in: Point, line, circle
Display system: Monographic LCD 320 x 240 dots,
with back light Measurement result
wiÊÕÌ«ÕÌ\ÊÊ ,-ÓÎÓ
ÊÕÌ«ÕÌÊ
-6ÊvÀÌ]Ê18
10F format Display language:
JapaneseEnglishGermanFrench ItalianSpanishPortuguese
Data input: ,-ÓÎÓ
]Ê8É9ÉÝÃÊÃ}]ÊÌÃÜÌV
Data output: RS-232C, Printer, Floppy disk drive unit
Power supply 100V AC to 240V AC
Mass 2.2kg stand-mount type
2.1kg arm-mount type
QM-Data 200 Stand-mount type
UÊÀ«
VÊ`Ã«Þ Measurement information and data are
visualized on the back-lit LCD display with graphical interfaces. The geometric feature
that you selected is displayed with the probing navigator. The measurements map
and blink indication show you the probing points and sequences. Simply probe points
and click by following the blink indicator the measurement can be easily completed
even a beginner. This improves operation accuracy and reduces errors and time.
UÊÌÕÌÛiÊ«iÊ`iÃ} The QM-Data200 employs the Geometry
Keys” to accelerate the measurement process. The probing routine of standard
geometric features and combinations are designed with Geometry Keys on the front
panel. Click of a key that you need and capture features you can complete the
measurement quickly and accurately. This improves operator productivity, reduce
errors and save operation time and cost. The QM-Data200 is a geometric readouts
analysis unit for optical instruments like a profile projectors. This features powerful
2-D coordinate measurement capabilities with unmatched simple key operation.
The QM-Data200 improves operator productivity, minimizes errors and save a
total measurement time and production cost.
FEATURES
UÊ6ÀÕÃÊ}À«
VÊ`ëÞÃÊÊÌ
iÊÀ}iÊ
Ê screen for easy measurement operations.
UÊiiÞÊ«iÀÌÊvÀÊVLi`Ê measurements that are often used circle-
circle distance, etc. UÊ
iÊÊiÃÕÀiiÌÊvÕVÌÊÕÌÌVÊ
identification of measuring item eliminates switching between the measurement
command keys. UÊ
µÕ««i`ÊÜÌ
ÊÌ
iÊiÃÕÀiiÌÊ«ÀVi`ÕÀiÊ
teaching function and the measuring position navigation in Repeat mode.
UÊ
iÊÕÃiÀÊiÕÊvÕVÌÊÜÃÊÕÃiÀÊÌÊ register measurement commands or part
programs to create hisher own menu. UÊiÀViÊâiÊiÃÕÀiiÌÊvÊ`ÌÊ
processing result and various statistical processing for each item are available.
UÊ iÃÕÀiiÌÊÀiÃÕÌÊÕÌ«ÕÌÊÌÊ”MS- Excel” in spreadsheet CSV format.
UÊ
iÊiÃÕÀiiÌÊ«ÀVi`ÕÀiÊ`Ê measurement result can be saved, using
the optional floppy disk drive unit. UÊÜÊ`iÃÊÀiÊÛLi\ÊÊÃÌ`iÊ
type with tilt system and a flexible arm type that can be mounted on a Profile
Projector.
QM-Data200 Order No.: 264-145A stand-mount type
Order No.: 264-146A arm-mount type Order No.: 264-149A for Hyper MFMF-U
US-1001
I-29
£°x
£xä {{°x
{ For FDD unit
connection USB Power
switch
For footswitch input For printer
connection For RS-232C output
Connected to PC SPC cable
936937 1m x2pcs.
Connecting cable D
12AAD195
Connecting cable B
12AAD193
Connecting cable C
12AAD194 MUX-10F
264-002A
DMX-2 12AAD538
RS-232C cable 2m
12AAA807 Main unit with SPC output
Main unit with RS-2322C output
KC Counter PJ-A3000DF, PJ-H30, MFMF-U
PJ-A3000, PH-3515F 172-847,
PJ-500
Main unit without counter
All profile projectors with the linear scale
XY stage can be connected directly.
For stick memory connection USB
QM-Data200: Rear panel
Optional Accessories
12AAH035: Floppy disk drive unit USB type 12AAD034: Receipt printer for 120V
908353:
Printer paper for receipt printer
12AAA804: Printer cable 2m 937179T:
Foot switch
12AAD193: Connection cable B 12AAD194: Connection cable C
12AAD195: Connection cable D 12AAA807: RS-232C cable 2m
12AAA920: RS-232C cable 3m
DIMENSIONS
Optional Accessories
12AAE671: Detector attachment A
PJ-A3000, PJ-H30, PH-3515, PH-A14 series Adaptation diameter of a screen:
10” ø250 to 14” ø350mm
12AAE672: Detector attachment B
PJ-500, PV-5110, PV-600A series Adaptation diameter of a screen:
20” ø500 to 24” ø600mm
Detector attachment optional
OPTOEYE-200
iÊ
9
ÓääÊ}iÊ
`}iÊ-iÃÀÊ eliminates human errors which may be
involved in visual alignment, ensuring speedy, accurate, and consistent
iÃÕÀiiÌÃ]ÊÀi}À`iÃÃÊvÊ«iÀÌÀ¿ÃÊð
FEATURES
UÊ
9
ÓääÊ`«ÌÃÊÊÌ
ÊwLiÀ«ÌVÊ cable for detector connection to offer
easy set-up and smart operation without obstructing your view.
UÊ À}
ÌÊ`Ê`ÀÊLÕÌÌÃÊÜÊiÃÞÊ calibration.
UÊ
9
ÊVÊLiÊ«ÜiÀi`ÊLÞÊ+ÌÓääÊ via the connecting cable. It means that no
AC adapter is required. UÊThe brightness of the chart can be adjusted.
Technical Data
Image detection UÊÀiVÌÛÌÞ\Ê
`ÀiVÌ UÊMin. diameter:
ø2mm on the screen UÊMin. width:
1mm on the screen UÊMax. moving speed: 1000mms
Applicable illumination UÊÞ«i\Ê
Surface Contour illumination UÊRange:
30Lx to 1500Lx on the screen Bright-Dark field difference: 20Lx
Repeatability: 1μm in contour illumination
Function: Error in detection of illumination change
Supporting a contour illumination brightness selector switch of projector
OPTOEYE-200 Order No.: 332-151
unit: mm
US-1001
I-30 FEATURES
UÊ
iÊÕÌÌVÊi`}i`iÌiVÌÊÌÃÊ`Ê various macro icons allow measurement in
one easy step. UÊ
iÊ}À«
VÃÊ`ÊiÃÕÀiiÌÊÛ}ÌÊ
functions facilitate operation. UÊ}iÊ`ÌÊ«ÕÌÉÃÌÀ}iÊvÕVÌ°
UÊiÃÕÀiiÌÊÀiÃÕÌÃÊÀiÊÕÌ«ÕÌÊÌÊ- Excel
®
. This lets the user generate an inspection table on the same computer.
UÊÜÃÊÌ
iÊÌiÀViÊâiÊiÃÕÀiiÌÊvÊ measurement results and various types of
statistical processing for each item. UÊ
Li`ÊÕÃiÊÜÌ
ÊÌ
iÊvVÕÃÊ«ÌÊ«ÀÛ`iÃÊ
high-accuracy in height measurements. Patent pending
SERIES 359 — Vision System Retrofi t for Microscopes
The PC system, QSPAK software and microscope are optional.
QSPAK Measurement Window
QSPAK, optional software
For observationcomparison of form
s¬4EMPLATE¬MATCHING¬FUNCTION s¬-ANUAL¬PATTERN¬MATCHING¬FUNCTION
For simple measurement
s¬NE
CLICK¬EDGE¬DETECTION¬TOOL¬FUNCTION s¬3MART¬TOOL¬FUNCTION
s¬5SER¬MACRO¬FUNCTION
For repeated measurementauto- measurement
s¬1UICK¬NAVIGATION¬FUNCTION s¬0LAYBACK¬FUNCTION
s¬RAPHIC¬FUNCTION s¬XTERNAL¬DATA¬OUTPUT¬FUNCTION
s¬3TATISTICAL¬CALCULATION¬FUNCTION
Technical Data
Projected image: Inverted image
Camera unit Ê UÊ}iÊÃiÃÀ\Ê
ÀÊ
-ÊViÀ Ê UÊ,iÃÕÌ\Ê
ä°äää£ Ê UÊiÃÃ\Ê
{ÝÓ°ÎÝΰx»ÊÉÊ£ääÝxnÝnÊ7ÝÝÊ® Ê UÊÃÃ\Ê
£LÃÊÉÊä°{} Adapter unit
Ê UÊ«iÀÌ}ÊÃvÌÜÀi\Ê+-Ê61
Ê«Ì® Ê UÊiÃÃ\Ê
£°nÊÝÊx»ÊÉÊ{xÊÝÊ£ÓÎ Ê UÊ}wÊVÌ\Ê
ä°x8 Ê UÊÃÃ\Ê
ä°nLÃÊÉÊä°Î} }wÊVÌÃ\Ê
Ó£8ÊÊÓ£ä8ÊÊ£¸ÊÌÀ Standard accessory:
Foot switch 12AAJ088
Vision Unit No.: 359-737 for MF C
No.: 359-739 for MF-UC No.: 359-791 for Hyper MF
MFU
UÊÊÃiÀiÃÊvÊiÃÕÀ}Ê«iÀÌÃÊVÊLiÊ performed using just one screen display.
UÊ
iÊÕÌLÀ}
ÌiÃÃÊVÌÀÊvÕVÌÊ faithfully reproduces the type and degree
of illumination used. This function is limited to the MFMF-U series.
One-click Edge Detection
Just by clicking the mouse near the edge of a workpiece, QSPAK automatically scans the edge and detects it, showing
its coordinates. This function also works with the point tool, box tool, circle tool and auto-focus tool.
Graphic Window
The measurement results and measured elements are plotted in the graphic window in real-time. By using this function the
user can check the current measuring position at a glance. The graphic window can be used for geometrical calculation.
Fiber-optic ring illuminator
CMOS camera unit QSPAK
Vision Unit
10X objective 5X objective
3X objective 1X objective
Measuring microscope w XY or XYZ counter
Calibration glass chart No. 958448
Laser printer Foot switch
No. 12AAJ088 Adapter unit
: Optional accessory
PC 19 color display
Connecting cable Multi IO card
Focus Pilot No. 375-057A: for MF models
No. 375-067A: for MF-U models
A for ULCSA, D for CEE, E for BS, DC for China, K for EK, C for Taiwan, No suffix is required for JIS100V
US-1001
I-31
SERIES 378 — High Power Inspection Microscope
FEATURES
UÊ
iÊV«iÌiÊÃÞÃÌiÊvÊ-ÎääÊVÊLiÊ composed of a variety of parts for meeting
diverse applications. UÊÛLiÊÜÌ
ÊÀÊÜÌ
ÕÌÊÊÌÀÃÌÌi`Ê
illuminator. UÊ1ÌÀ}ÊÜÀ}Ê`ÃÌViÊLiVÌÛiÃÊ
provide easy manipulation of workpieces. UÊ
ÃÞÊÃÜÌV
}ÊLiÌÜiiÊÌ
iÊLÀ}
Ìwi`Ê
illumination and the dark-field illumination. UÊ«ÌÊVViÃÃÀiÃÊÜ`iÊÌ
iÊÀ}iÊvÊ
applications.
FS-300 with optional accessories
The FS-300 is designed for inspecting micro- components such as IC chips and video head
parts. The optical system features ultra-long working distance objectives, wide view field
eyepieces, and independent correction for lateral chromatic aberration.
SPECIFICATIONS
Main unit Observation system
Bright field BF:
378-320, 378-322, 378-324, 378-326
Brightdark field BFDF:
378-321, 378-323, 378-325, 378-327
Reflected illumination Koehler illumination With aperture diaphragm centering mechanism and field stop
12V100W halogen lamp non-stepped brightness adjustment With filter mounting slot 2-slot With BFDF switching slide
378-321, 378-323, 378-325, 378-327 only
Transmitted illumination 12V100W fiber illumination non-stepped brightness adjustment With aperture
diaphragm
378-322, 378-323, 378-326, 378-327 only
Focus adjustment With concentric coarse and fine focusing wheels right and left
Fine adjustment: 0.1mmrev. for 32mm travel range Coarse adjustment: 3.8mmrev. for 32mm travel range
Power revolver Inward type with 4 lens mounts
Workstage ÀÛiÊÃÌÀi\Ê£{ÊÝÊ£Ó¸ÊÉÊÎxÈÊÝÊÎäÈÊÜÌ
Ê8É9ÝÃÊwiÊvii`ÊLÃÊ
and coarse travel handle Optical tube Type
Trinocular tube erect image Field number
24 Depression angle
Ýi`ÊÓä¨\Ê378-320, 378-321, 378-322, 378-323 `ÕÃÌLiÊä¨ÊÌÊÓä¨\Ê378-324, 378-325, 378-326, 378-327
Intermediate image mag. £8 Optical pass ratio
eye piece TV: 1000 or 0100 Pupil distance
Siedentopf type, adjustment range: 2 - 3 51 - 76mm Eyepiece
Field of view
£ä8É©Îä\Ê378-320, 378-321, 378-322, 378-323 £ä8É©Ó{\Ê378-324, 378-325, 378-326, 378-327
Applicable objective optional M Plan Apo, M Plan Apo SL, G Plan Apo:
378-320, 378-322, 378-324, 378-326
BD Plan Apo, BD Plan Apo SL: 378-321, 378-323, 378-325, 378-327
Dimensions Main unit
14.2 x 32 x 27.2 360 x 803 x 568.5mm Workstage
28 x 16 700 x 400mm Power supply
100 to 240VAC, 5060Hz Power consumption
Approx. 150W:
378-320, 378-321, 378-324, 378-325
Approx. 300W:
378-322, 378-323, 378-326, 378-327
Mass Approx. 110lbs 50kg including workstage
Polarized light observation: Observing only the filtered light that vibrates
in one direction. Used for observing materials with special optical characteristics, such as
mineral and liquid crystal.
Differential interference observation: Effective in detecting fine scratches and steps
on the surface of metal, liquid crystal, and semiconductors.
Dark field observation: Observing only the scattered light by shutting
down the direct light to the objectives. The scratches and dust that cannot be viewed in
the bright view field can be observed by a high-contrast.
Bright field observation: Most common method of observation.
Observing directly the light reflected on the surface of workpiece.
US-1001
I-32
SERIES 378 — Microscope Unit for Semiconductor Inspection
-
ÀÌÊLÃiÊ`iÊ °
Order No.
FS70-S 378-184-2
FS70-THS 378-184-4
FS70Z-S 378-185-2
FS70Z-THS 378-185-4
FS70L-S 378-186-2
FS70L-THS 378-186-4
FS70L4-S 378-187-2
FS70L4-THS 378-187-4
Focus adjustment 50mm travel range with concentric coarse 3.8mmrev and fine 0.1mmrev focusing wheels right left
Image Erect image
Pupil distance Siedentopf type, adjustment range: 2 - 3” 51 - 76mm
Field number 24
Tilt angle —
0° - 20° —
0° - 20° —
0° - 20° —
0° - 20° Optical pass ratio
5050 1000 or
0100 5050
1000 or 0100
1000 or 0100 1000 or 0100
Protective filter —
— Built-in laser beam filter
Built-in laser beam filter Tube lens
£8 £8ÊÊÓ8Êâ
£8 £8
Applicable laser —
— 1064532355nm
532266nm Camera mount
C-mount using optional adapter B Use a laser with TV port.
C-mount receptacle with green filter switch
Illumination system, optional
Reflective illumination for bright field Koehler illumination, with aperture diaphragm 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W
Objective, optional for observation
M Plan Apo, M Plan Apo SL, G Plan Apo Objective, optional
for laser-cutting —
É
ÊÊ ,] É
ÊÊ 16
M Plan UV Loading weight
32lbs14.5kg 30lbs13.6kg 31lbs14.1kg 29lbs13.2kg 31lbs14.2kg 30lbs13.5kg 31lbs13.9kg 29lbs13.1kg
Mass main unit
13lbs6.1kg 15.5lbs7.1kg 14.5lbs6.6kg 16.5lbs7.5kg 14lbs6.4kg
15.5lbs7.2kg 14.5lbs6.7kg 16.5lbs7.5kg
Loading weight on optical tube excluding weight of objective lenses and eyepieces
SPECIFICATIONS
`iÊ °
Order No.
FS70 378-184-1
FS70-TH 378-184-3
FS70Z 378-185-1
FS70Z-TH 378-185-3
FS70L 378-186-1
FS70L-TH 378-186-3
FS70L4 378-187-1
FS70L4-TH 378-187-3
FEATURES
UÊ
iÊ«ÌVÊÃÞÃÌiÊÌ
ÌÊ
ÃÊÀ}ÞÊ developed for the best seller FS 60 models
was further enhanced for the FS70 models. It is ideal as a microscope unit of a prober
station for semiconductors. All models CE marked.
UÊ
iÊ-ÇäÊÃÕ««ÀÌÃÊÌ
ÀiiÊÌÞ«iÃÊvÊ9Ê laser wavelength ranges 1064nm, 532nm
and 355nm, while the FS70L4 supports two types of wavelength ranges 532nm
and 266nm, thus expanding a scope of laser applications, allowing laser-cutting
of thin-films used in semiconductors and liquid crystal substrates. However, Mitutoyo
assumes no responsibility whatsoever for the performance andor safety of the laser
system used with Mitutoyo microscopes. a careful examination is recommended in
selecting a laser-emission unit. UÊ À}
ÌÊwi`]ÊvviÀiÌÊÌiÀviÀiViÊ
Contrast DIC and polarized observations are standard with the FS70Z. The FS70L
and FS70L4 do not support the DIC method.
UÊ ÞÊi«Þ}ÊÊÜÀ`ÊÀiÛÛiÀ]ÊÌ
iÊ long working distance objectives provide
excellent operability. UÊÊiÀ}VÊ`iÃ}ÊÜÌ
ÊÃÕ«iÀLÊ
operatability: the FS70 employs the erect- image optical system the image in the
field of view has the same orientation as the specimen and enlarged fine focus
adjustment wheel with rubber grip coarse adjustment knob.
Technical Data
Focus adjustment Ê UÊiÌ
`\
With concentric coarse and fine focusing wheels right and left
Ê UÊ,}i\Ê 50mm travel range
0.1mmrev. for fine adjustment, 3.8mmrev. for coarse adjustment
Trinocular tube Image: Erect image Pupil distance:
Siedentopf type, adjustment range: 2-3 51-76mm
Field number: 24
ÌÊ}i\Ê ä¨ÊÊÓä¨ÊÞÊ]Ê-Ê`iî
Illumination system: Reflective illumination for bright field
Koehler illumination, with aperture diaphragm
Light source: 12V100W fiber optics,
non-stepped adjustment, light guide length 1.5m,
power consumption 150W Objectives optional: M Plan Apo-4, M Plan Apo SL, G Plan
Apo
FS70Z FS70L
FS70L4
US-1001
I-33
SERIES 378 — Assembly Type Microscope Unit
FEATURES
UÊ}
ÀÌÊ{ä8ÊâÊÜÌ
ÊiÝViiÌÊ operability.
UÊ}
ÀiÃÕÌÊLiVÌÛiÊ£ä8®ÊÃÕ««i`ÊÃÊ standard.
UÊ6ÀÕÃÊ«ÌÊLÀ}
Ìwi`ÊLiVÌÛiÃÊ attachable.
UÊ
iÊÃ`iÊÌÞ«iÊiÃÊÕÌÊÜÃʵÕVÊ change between the monitoring and laser
beam cutting objectives. UÊ
ÀiiÊÜÛii}Ì
ÊiÀÊvÀÀi`]ÊÛÃLi]Ê
near ultraviolet, ultraviolet lasers supported.
UÊ
ÕÌÊÌÌV
i`ÊÃÊÃÌ`À`° UÊ
iÊÕÊÀÊ«ÜiÀÊÌÞ«iÊÃÞÃÌiÊ
selectable according to the purpose. The VM-ZOOM40 is an assembly type
microscope unit that has drastically improved operability and the quality of visual images
by combining the main unit, which has a high-magnification zooming system, with a
newly developed high-resolution objective, which has a long working distance. If the VM-
ZOOM40 is used with an analysis prober and various other laser repair equipment, it will
greatly aid in development, manufacturing, and inspection of semiconductors and LCD
panels.
SPECIFICATIONS
Total magnification £ää8ÊÊ{]äää8ÊÜ
iÊÕÃ}Ê
12-inch CCD camera and 14-inch monitor
Magnification of tube ä°Óx8ÊÊ£ä8Ê
Zoom ratio 1:40 Objective
ÊÊ«Ê,Ê£ä8 Field of view
UÊ£ÉÓV
Ê
ÊViÀÊ«Ì®\Ê 2.56x1.92mm - 0.064x0.048mm
UÊ VÕÀ\ʩΰÓÊÊ©ä°änÊ Reflected illumination
UÊi
iÀÊÃÞÃÌiÊÜÌ
Ê«iÀÌÕÀiÊ stop Power zoom type.
UÊ«ÌÊÕÌÊÃÊÀiµÕÀi`Ê for the manual zoom type.
Light source Halogen bulb 21V, 150W
Focusing unit Concentric coarse and fine
wheels Power supply
20Lx min. on the screen Mass
Main unit: Approx. 7kg Binocular unit: 1kg
Remote controller unit: Approx. 7kg
Selection Guide of System Configuration
Order No.
Depends on each system configuration
378-171A 378-172A
378-173A 378-174A
378-175A 378-176A
378-177A 378-178A
378-181A 378-182A
Remarks Manual zoom function
● ● ● ●
Power zoom function
● ● ● ● ● ●
Fiber-optic illumination controller is also provided. Single-objective mount
● ●
Double-objective mount
● ● ● ● ● ● ● ●
The objective can be switched due to the sliding mechanism.
Binocular unit
● ●
● ●
●
£ä8ÊiÞi«iViÃÊÎÇnnxÈ®ÊÀiÊ«ÀÛ`i`° 9ÊÃiÀÊ£äÈ{ÉxÎÓÉÎxx®ÊÕÌ
● ● ● ●
9ÊÃiÀÊxÎÓÉÓÈÈ®ÊÕÌ
● ●
Focusing unit
● ● ● ● ● ● ● ● ● ●
CCD camera mount
● ● ● ● ● ● ● ● ● ●
ÊÊ«Ê,Ê£ä8ÊLiVÌÛi
● ● ● ● ● ● ● ● ● ●
●: Included in the set.
US-1001
I-34
VMU-V
SERIES 378 — Video Microscope Unit
Selection Guide of System Configuration
Order No.
Depends on each system configuration
378-505 378-506
378-507 378-508
378-513 378-514
Vertical CCD camera mount
● ● ● ● ●
Horizontal CCD camera mount
●
9ÊÃiÀÊÕÌ
● ● ● ●
Fiber-optic illumination unit
● ● ● ●
M Plan Apo, M Plan Apo SL, G Plan Apo objectives for bright field observation
▲ ▲ ▲ ▲ ▲ ▲
ÊÊ«Ê ,]Ê
ÊÊ«Ê ,]ÊÊ Ê«Ê 16Ê`Ê
ÊÊ«Ê 16Ê
objectives for laser cutting
▲ ▲ ▲
M Plan UV objectives for laser machining
▲ ▲
●: Provided, ▲: Available as optional accessory
The VMU is a compact, light-weight, and easy-to-install microscope unit for CCD
camera monitoring in semiconductor fabrications.
SPECIFICATIONS
Maginification of tube £8
Applicable wavelength
378-505, 378-506
iÀvÀÀi`Ê`ÊÛÃLiÊÀ`Ì 378-507
378-513 iÀvÀÀi`ÊpÛÃLipÊiÀÕ
traviolet radiation 378-508
Visible and ultraviolet radiation 378-514
iÀvÀÀi`ÊÌÊÕÌÀÛiÌ Objective
Optional Reflected illumination
UÊiiViÌÀVÊÃÞÃÌiÊÜÌ
Ê«iÀÌÕÀiÊ stop system
UÊLiÀ«ÌVÊÕÌÀÊ«Ì®Ê is required.
Light source Halogen bulb 21V, 150W
optional Mass
378-505: 570g 378-506: 590g
378-507: 980g 378-508: 1010g
378-513: 1300g 378-514: 1300g
FEATURES
UÊ
iÊ«ÌVÊÃÞÃÌiÊviÌÕÀiÃÊÕÌÀ}Ê working distance objectives and correction
for the wide range of radiation. UÊ
iÊwLiÀ«ÌVÊÀiyiVÌi`ÊÕÌÊii«ÃÊ
the workpiece free from thermal expansion caused by heat. The fiber-optic illuminator
is required for the light source. UÊÃÊÛLiÊÜÌ
ÊÊÃiÀÊÕÌÊÀÊ
revolving nosepiece objective mount.
VMU-H
VMU-L VMU-L4
US-1001
I-35
SERIES 378 FEATURES
UÊ
iÊwÊi`ÊvÊÛiÜÊÃÊiÝÌÀÊÜ`i° UÊ«ÌÊÀiÌViÃÊÀiÊÛLi°
Objectives
SERIES 378
The Mitutoyo 378 Series objectives have the ÜÀ`¿ÃÊ}iÃÌÊÜÀ}Ê`ÃÌViÊ`ÊÊ
infi nity correction optical system. These ob- jectives provide fl exible observation at high
magnifi cations and independent correction of chromatic aberration.
FEATURES
UÊ
iÊ}ÊÜÀ}Ê`ÃÌViÊÌÞ«iÊLiVÌÛiÃÊ provide excellent clearance between the
lens surface and the workpiece surface in focus, making it possible to observe work-
pieces which are usually hard-to-focus because of awkward projections.
378-858 378-857
378-866
M Plan Apo and M Plan Apo SL objectives for bright fi eld observation
BD Plan Apo and BD Plan Apo SL objectives for brightdark fi eld observation
Near-infrared radiation corrected M Plan Apo NIR objectives
Near-ultraviolet radiation corrected M Plan Apo NUV objectives
Ultraviolet radiation corrected M Plan UV objectives
Reticles optional
516848:
Cross-hair
516576: Broken cross hair 90