Piezoelectric Applications Literature Review
16 thin quartz crystals glued between two steel plates, and a hydrophone to detect the
returned echo.
The successful practical use of piezoelectricity in sonar created intense development interest in piezoelectric devices. Over the next few decades, new piezoelectric materials
and new applications for those materials were explored and developed, for instance, in 1927 Morrison and Horton demonstrated the Quartz crystal clock [34], which had been
developed into various modern day applications such as computers, calculators, digital watches and mobile phones.
With the rapid development in micro-fabrication technology, microscopic devices based on piezoelectric materials were able to be fabricated. One of the earliest examples is the
piezoelectric cantilever developed by Blom
et al
[35]. They used ZnO as the piezoelectric material to sputter on CVD Chemical Vapour Deposition SiO
2
. Later, Lee
et al
[36] used the method to develop a piezoelectric acoustic transducer for the application of highly sensitive micro-phone and micro-speaker.
Due to piezoelectric direct energy conversion between the electrical domain and the mechanical domain and thus prompt response ~ns, the application of piezoelectric
materials has expanded into the detection of atomic masses. Itoh
et al
[37] had developed the first self-excited force-sensing micro-cantilever for dynamic scanning
force microscopy SFM. The devices have two piezoelectric ZnO layers on a SiO
2
film. One of the layers was utilised for excitation and detection of the lever and the other for
its static deflection. Yi
et al
[38] reported both experiment and theoretical investigations of the resonance frequency change of a piezoelectric unimorph cantilever due to the
mass loaded at the tip of the cantilever, which is possible for bio-sensing applications.
As the piezoelectric activity in some materials has greatly improved over time, the electrical energy significantly increased and the idea of energy harvesting became
popular. One of the earliest piezoelectric energy harvesting systems was developed by Umeda
et al
[39] based on mechanical impact using a piezoelectric transducer. However, the details of the materials used to fabricate the transducer were not
discussed. From their initial experiment, they dropped a 5.5 g steel ball bearing from 20 mm onto a piezoelectric transducer which consisted of a 19 mm diameter, 0.25 mm
17 thick piezoelectric ceramic bonded to a bonze disc of 0.25 mm thick with a diameter of
27 mm. They found that the optimum efficiency of the impact excitation approach is 9.4 into a resistive load of 10 kΩ with most of the energy being returned to the ball
bearing which bounces off the transducer after the initial impact.
The interests in energy harvesting increased with advances in wireless technology and low power electronics. Piezoelectric materials are used to fabricate micro-generators
which are able to capture the ambient vibration energy surrounding the electronics and converting this into usable electrical energy to power microelectronic devices. The
application of energy harvesting is not limited to the ambient environment; it is also possible to harvest energy from human body. One such example is a shoe-mounted
piezoelectric developed by Shenck
et al
[40]. They explored two methods, one of which is by harnessing the energy dissipated in bending the ball of the foot, using a flexible,
multi-laminar PVDF bimorph stave mounted under the insole. The second one is to harness foot strike energy by flattening curved, pre-stressed spring metal strips
laminated with a semi-flexible form of piezoelectric PZT under the heel, consisting of two back-to-back single-sided unimorphs. The PVDF transducer produced an average
power of 1.3 mW when driving a 250 kΩ load at a 0.9 Hz walking pace, while the PZT
transducer produced an average power of 8.4 mW in a 500- kΩ load at the same walking
pace.
The examples given above are by no means an exhaustive list of piezoelectric applications. The range of piezoelectric materials applications are far too large to be
covered in this work, therefore to suit the purpose of the study, piezoelectric materials fabricated in the form of cantilevers for the application of vibration energy harvesting
will be discussed in detail.