Maximum Allowed Stress Theoretical Analysis of Multilayer Structures

52 The resultant stress on the clamped area of a beam for each layer of a unimorph is proportional to the input moment divided by the inertia across the length of the beam as, 3-23 To find the exact value of stress of each layer of the material, the moment inertia of the beam, I b has to be defined. The transformed cross-section of a unimorph is redrawn in Figure 3-5 with parallel-axis passing through the centroid of the beam. Figure 3-5: Parallel-axis for a transformed cross-section of a unimorph. From the parallel-axis theorem for the moment of inertia [93] 3-24 where d is the distance from the centroid of the layer to the neutral axis of the structure and A is the cross-section area of the layer. The integration of the second term at the right hand side of equation 3-24 is zero, therefore, the total moment of inertia for a unimorph as shown in Figure 3-5 is, 3-25 dl I d l M l b l unimor ph b l   1  ½ h e1 ½ h e2 h 2 h 3 h N Neutral axis ½h p h w                h h h h h h h h dA d dA h d dA h dA d h I 2 1 2 1 2 2 1 2 1 2 1 2 1 2 2 1 2 1 2 2                                              2 2 3 2 2 1 2 1 3 2 3 1 2 3 2 1 2 1 12 1 2 1 12 1 e e e e e ep p N p p unimor ph h h h h h he h h w n h h wh wh I 53 where n ep is the elastic modular ratio as defined in equation 3-20. By substituting h 2 = h p + h e1 – h N and h 3 = h N + h e2 in equation 3-25, we get 3-26 If the neutral axis is passing through the PZT centroid, p N h h 2 1  and the upper electrode and lower electrode are made of same material and with same thickness, e e e h h h   2 1 , equation 3-26 can be simplified as 3-27 Comparing equation 3-27 to the bending modulus per unit width in equation 3-13, we get 3-28 The input moment as a function of length from the clamped area of a beam, Mx is 3-29 By substituting equation 3-4, 3-18 and 3-28 into 3-23, we get 3-30                 p e e p e ep p unimor ph h h h h h n h w I 2 2 3 3 2 1 3 2 12 1 p unimor ph e Dw I     l l z y M x M b eff                                       2 2 2 2 1 2 2 1 1 1 236 . 118 . r r D y l w M h h h d l e unimor ph b b pm p p e e e b p l                             1 1 1 2 1 2 2 2 1 2 3 2 3 1 2 3 1 e p p e p e e e N e e N e e ep h h h h h h h h h h h h h h wn           N p N p p unimor ph h h h h h w I 2 2 3 3 1 54 We can see from equation 3-30 that the resultant stress is proportional to the distance from the neutral axis, and therefore the thicknesses of the upper and lower electrodes are very critical in determining the resultant stress of the beam. The equation also shows that the width of the cantilever does not affect the resultant stress, though there is a practical limit to the size of the width. A beam with a small ratio of width to its thickness when subjected to shear force will be twisted and become unstable and is therefore not suitable to be operated as a resonant device. Maximum stresses are produced on the upper and lower electrodes compared to the PZT layer when the beam is vibrating. Thus the elastic modulus of the electrodes has to be high in order to support the brittle ceramic layer at the centre of the structure.

3.4.4 Maximum Allowed Deflection

Thick-film free-standing structures are realised by elevating part of the film from the substrate, therefore limiting the deflection of the cantilever to a height constrained by the fabrication process. The maximum deflection of the cantilever has to be known so that the maximum dimension of the cantilever can be designed to suit the fabrication process. The deflection, z of a piezoelectric cantilever beam with no connection between its electrodes can be described by differential equation of the deflection curve as [93], 3-31 where e T is the resultant elastic modulus of PZT and electrode layers. The total stress in the composite structure is the sum of the stresses in the PZT layer and the electrode layer multiplied by their relative cross-sectional areas. Hence the resultant elastic modulus can be derived as, 3-32 unimor ph T I e l M dl z d 2 2    p p e p T e A e A e    1 55 where A p is the area ratio of the PZT layer to the total cross-sectional area of the composite beam. Solving equation 3-31 for a beam attached with proof mass, we get, 3-33 Substituting equation 3-5, 3-18, 3-28 and 3-32 into 3-33, we get, 3-34

3.4.5 Estimated Output Voltage

The output voltage for a piezoelectric cantilever can be estimated with equation 2-15 deduced from the Roundy’s dynamic model [12] Appendix C. Although the model is oversimplified, it does give a reasonably good approximation of the amount of voltage generated. At resonant frequency, equation 2-15 can be simplified as, 3-35 where e T is the resultant elastic modulus as defined in equation 3-32 and d is the distance from the centroid of the layer of PZT to the neutral axis of the structure as defined in equation 3-22.   unimor ph T b eff I e l z y M z 3 3                                                      2 2 2 2 1 2 1 4 2 1 1 1 1 1 3 236 . 236 . r r D h h h h n y l w M h h h l z unimor ph p e e p ep b b p p e e e b                         p r T r r T b in p T RC k j l da h d je V       2 4 3 2 31 2 2 2 31