The Functioning Principle Multimorph

154 generating a voltage of the same polarity as the poling voltage; whereas the compressive forces on the lower piezoelectric elements generate a voltage of opposite polarity to that of the poling voltage. Figure 7-3: Schematic diagram of a a multimorph structure and b transformed cross-section of a composite multimorph structure. The output voltage of a piezoelectric cantilever can be estimated with the model developed by Roundy et al [12] and is rewritten here, 7-1 where A in is the base input acceleration, is the dielectric constant of the piezoelectric material, ζ T is the total damping ratio the sum of electrical and mechanical damping ratios, C p is the capacitance of the piezoelectric material and E T is the elastic modulus of the composite structure. a h l Rigidly Clamped Centroid Plane of PZT Layer Centroid Plane of PZT Layer d h N b h e1 h p2 h e4 h e3 h p4 h p3 h e2 h p5 h p1                    p r T r r T b in p T RC k j l dA h d je V       2 4 3 2 31 2 2 2 31 155 One of the controllable factors that can improve the output voltage is increasing the distance between the PZT layer and the neutral axis of the multimorph structure, d . The neutral axis of the composite multimorph as shown in Figure 7-3 b can be determined by the transformed-section method [93] as, 7-2 where h pi is the thickness of PZT layer- i and h ej is the thickness of electrode layer- j , while H E is a parameter related to the elastic modular ratio, n ep which is given by, 7-3 and the elastic modular ratio is, 7-4 where e e and e p is are the elastic modulus of electrode and PZT respectively. Taking ‘ ’ as the reference point, the distance for the centroid of PZT of a particular section to the neutral axis of a composite multimorph, as shown in Figure 7-3 a can be written as, 7-5 where  is -1 for a layer above and +1 for a layer below the reference point as shown in Figure 7-3 b. For simplification, the thickness of all the PZT sections and electrode sections are uniform with thickness h p and h e respectively as shown in Figure 7-4.                                      5 1 4 1 4 4 3 5 3 4 2 1 2 3 1 2 3 2 2 5 2 4 2 1 2 2 2 3 2 2 i j ej ep pi E ep p e p e p e e p p p e p p p p p p p N h n h H n h e h h h h h h h h h h h h h h h h h h h     4 4 4 3 2 1 1 2 1 3 3 2 4 2 3 2 2 2 1 2 e p e e e e e p e e p e e e e E h h h h h h h h h h h h h h h H           p e ep e e n  N i j ej i pi pi mm h h h h d              1 1 2 1  156 Figure 7-4: Cross-sectional view of a composite multimorph with uniform thickness of PZT and electrode layers. The bending modulus per unit width for a composite multimorph structure can be simplified as, 7-6 where D unimorph is the unimorph bending modulus per unit width, which is derived from equation 3-13, and therefore the multimorph bending modulus can be written as, 7-7 The moment of inertia for the multimorph structure can be obtained by substituting equation 7-7 into equation 3-28, 7-8 The stress in each section of the PZT can be calculated in a manner similar to that derived for the unimorph structure as shown in equation 3-30. ½ h p -½ h p -h e + ½ h p h e + ½ h p 2h e + 1½ h p h e + 1½ h p -h e + 1½ h p -2h e + 1½ h p          p e p e p e p e h h h h e h h h h p unimor ph multimor ph dz z E dz z E D D 2 3 2 2 3 2 2 3 2 1 2 2 2                     2 2 3 2 2 3 15 2 15 8 3 6 8 27 3 2 e p e p e e e p e p p p multimor ph h h h h h E h h h h h E D                           2 2 3 2 2 3 15 2 15 8 3 6 8 27 3 2 p p e p e p e e p e p p multimor ph h h h h h E E h h h h h w I 157 In order to be more precise when including the non-active PZT protective layers, the total bending modulus is, 7-9 and the moment of inertia is, 7-10                            a e a p e p a e p a a p multimor ph mm h h h h h h h h h h h E D D 12 4 27 6 2 9 18 3 2 2 2 2 3                               a e a p e p a e p a a p e e p p p h h h h h h h h h h h h h h h h E 12 4 27 6 2 9 18 3 6 8 27 3 2 2 2 2 3 2 2 3           p e e p e e h h h h h E 2 2 3 15 2 15 8                               a e a p e p a e p a a p e e p p mm h h h h h h h h h h h h h h h h w I 12 4 27 6 2 9 18 3 6 8 27 3 2 2 2 2 3 2 2 3              2 2 3 15 2 15 8 p p e p e p e h h h h h E E 158

7.3 Experimental Samples

A series of composite multimorph structures as shown in Figure 7-5 was fabricated with a co-firing profile at 950 C. The devices consist of three individual sections of active piezoelectric materials with equal thickness of 40 µm and separated physically and electrically by AgPd conductors with equal thickness of 15 µm. The dimensions of the samples are summarised in Table 7-1, which will also be used for calculation to verify the theoretical model with the experimental results. Figure 7-5: Schematic diagram of a cross-sectional view of a composite multimorph structure. Table 7-1: Fabricated sample dimensions. Dimension BA1 Stress test BA2 Series polarised BA3 Parallel polarised PZT Length mm, l p 13.5 18 18 Electrode Length mm, l e 13 17.5 17.5 PZT Width mm, w p 9 9 9 Electrode Width mm, w e 8 8 8 PZT Thickness µm h 1 12.5 12.5 12.5 h 2 40 40 40 h 3 40 40 40 h 4 40 40 40 h 5 12.5 12.5 12.5 AgPd Thickness µm h e1 20 20 20 h e2 12 12 12 h e3 12 12 12 h e4 12 12 12 Refer to Figure 6-2 b Non-active PZT Layer Active PZT Layer Electrode h p0 Non-active PZT Layer h p1 h p2 h e1 h e2 h e3 h e4 h np h np Thickness of each layer 159 These samples were polarised with an electric field strength of 5.5 MVm 220 V dc on each PZT section of the composite multilayer structure, at an elevated temperature of 200 °C for 30 minutes. Two polarisation modes were studied; series and parallel modes. In the series polarised sample, both the upper and lower PZT sections were polarised in the same direction toward the centre section as shown in Figure 7-6 a creating an electrically neutral condition at the centre section. In the parallel polarised sample, the upper section and lower section of the PZT were polarised in opposite directions, as shown in Figure 7-6 b, where one facing into and the other facing out from the centre section which creates an opposite polarised centre section. When the multimorph structure is operating in a bending mode, charges with different polarity will be produced on the electrode layers, as shown in Figure 7-7. A resultant electrical output equal to the sum of the individual sections of the PZT layers will be produced when a combination of connections is made to the electrode terminals. Figure 7-6: Polarisation mode: a Series and b parallel. The number beside each layer denotes the fabrication sequence of electrode layers. Figure 7-7: Schematic diagram of charges generation when the multimorph structures were in upward bending position for a a series and b parallel polarised device. Polarisation polarity Polarisation polarity a b Charges polarity Charges polarity a b 1 2 3 4 1 2 3 4 + - + -